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Volumn 23, Issue 1, 2002, Pages 55-57
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Reduced floating body effects in narrow channel SOI MOSFETs
a
IEEE
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Author keywords
Isolation technology; MOSFETs; Semiconductor device measurements; Silicon on insulator technology
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Indexed keywords
CHARGE CARRIERS;
ELECTRIC BREAKDOWN;
SEMICONDUCTOR DOPING;
SILICON ON INSULATOR TECHNOLOGY;
STRESSES;
FLOATING BODY EFFECTS;
MOSFET DEVICES;
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EID: 0036163467
PISSN: 07413106
EISSN: None
Source Type: Journal
DOI: 10.1109/55.974811 Document Type: Article |
Times cited : (18)
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References (15)
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