A high-throughput search for electronic materials-thin-film dielectrics

Biotechnology and Bioengineering

Volumn 61, Issue 4, 1999, Pages 217-225

  Van Dover, R B ^a   Schneemeyer, L F ^a   Fleming, R M ^a   Huggins, H A ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

Dielectric; Electronic; Film; Insulator

Indexed keywords

ARTICLE; ELECTRONICS; FILM; INTEGRATED CIRCUIT; SYNTHESIS; TECHNIQUE;

EID: 0032323097     PISSN: 00063592     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0290(1998)61:4<217::AID-CC4>3.0.CO;2-L     Document Type: Article

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