A silicon micromachined scanning thermal profiler with integrated elements for sensing and actuation

IEEE Transactions on Electron Devices

Volumn 44, Issue 11, 1997, Pages 1857-1868

  Gianchandani, Yogesh B ^a   Najafi, Khalil ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT CONDUCTION; HEAT RESISTANCE; MASKS; MICROMACHINING; PROBES; SILICON SENSORS; SUBSTRATES; THERMAL NOISE; THERMOCOUPLES; THERMOELECTRICITY;

INTEGRATED ELECTROSTATICALLY DRIVEN SUSPENSION; SILICON MICROMACHINED THERMAL PROFILER (SMTP);

OPTICAL MICROSCOPY;

EID: 0031275324     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.641353     Document Type: Article

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