Bent-beam electro-thermal actuators for high force applications

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 31-36

  Que, L ^a   Park, J S ^a   Gianchandani, Y B ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CHEMICAL VAPOR DEPOSITION; ELECTRIC POTENTIAL; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROSENSORS; NICKEL; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; THERMAL STRESS;

BENT BEAM ELECTROTHERMAL MICROACTUATORS;

MICROACTUATORS;

EID: 0032638137     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1999.746747     Document Type: Conference Paper

References (10)