Design and characterization of high-torque/low-speed silicon based electrostatic micromotors using stator/rotor contact interactions

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 3 B, 1998, Pages

  Minotti, Patrice ^a   Langlet, Philippe ^a   Bourbon, Gilles ^a   Masuzawa, Takahisa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC MOTORS; ELECTROSTATIC DEVICES; MICROELECTROMECHANICAL DEVICES; ROTORS (WINDINGS); SENSORS; SILICON; STATORS; TORQUE MEASUREMENT;

DIRECT DRIVE MICROACTUATORS; ELECTROSTATIC MICROMOTORS; INTEGRATED TORQUE AMPLIFICATION;

ACTUATORS;

EID: 0032027274     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l359     Document Type: Article

References (10)