Thermally excited inchworm actuators and stepwise micromotors: Analysis and fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 372-379

  Okyar, Murat ^a   Sun, Xi Qing ^a   Carr, William N ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Inchworm; Internal stress; Micromotor; Thermal actuation

Indexed keywords

ACTUATORS; COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; MODULATION; OPTICAL DEVICES;

ACTIVE AND PASSIVE DEVICES; ANALYTICAL MODELS; BEAM EQUATIONS; BIMORPH ACTUATORS; CANTILEVER DEVICES; ELECTROSTATIC ACTUATIONS; INCHWORM; INCHWORM ACTUATORS; INTERNAL STRESS; MICRO MIRRORS; MICRO MOTORS; MICROMOTOR; NUMERICAL SIMULATIONS; POTENTIAL APPLICATIONS; TEMPERATURE DEPENDENTS; TEST RESULTS; THERMAL ACTUATION;

ELECTROSTATIC DEVICES;

EID: 0001253997     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284538     Document Type: Conference Paper

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