MICROMECHANICAL DEVICES WITH EMBEDDED ELECTRO-THERMAL-COMPLIANT ACTUATION

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1999-W, Issue , 1999, Pages 553-560

  Moulton, Timothy ^a   Ananthasuresh, G K ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY;

BUILDING BLOCKES; BULK- MICROMACHINING; COMPLIANT ACTUATIONS; DESIGN ISSUES; ELECTROSTATIC ACTUATION; MICROFABRICATED; MICROMACHINING PROCESS; MICROMECHANICAL DEVICE; THERMAL; THERMAL ACTUATION;

ELECTROSTATIC ACTUATORS;

EID: 85122708645     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1999-0320     Document Type: Conference Paper

References (15)

1. ABAQUS, 1999, Version 5.7 of ABAQUS finite element software from HKS, Inc., Pawtucket, RI.
2. Benecke, W. and Riethmuller, W., 1989, "Applications cf Silicon Microactuators Based on Bimorph Structures," Proceedings of the IEEE MEMS Workshop, Salt Lake City, Utah, Feb. 1989, pp. 116-120.
3. Chu, W.-H. and Mehregany, M., 1994, "Microfabricated Tweezers with a Large Griping Force and a Large Range cf Motion," Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, June 1994, pp. 107-100.
4. Comtois, J. and Bright, V., 1996, "Surface Micromachined Polysilicon Thermal Actuator Arrays and Applications." Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 1996, pp. 174-177.
5. Cragun, R. and Howell, L.L., 1998, "A Constrained Thermal Expansion Micro-Actuator," DSC-Vol. 66, Micro-Electro-Mechanical Systems (MEMS) Symposium at the International Mechanical Engineering Congress and Exhibition, pp. 365-371.
6. Cronos, 1999, Cronos Integrated Microsystems, a spin-off from Microelectronic Center of North Carolina (MCNC). Provider of a Multi-User-MEMS-Processes (MUMPs) foundry services.
7. Keller, C.G. and Howe, R.T., 1997, "Hexsil Tweezers for Teleoperated Micro-Assembly, " Proc. 10th Annual International Workshop on Micro-Electro-Mechanical Systems (MEMS'97), Nagoya, Japan, January 26-30, 1997, pp. 72-77.
8. Matlab, 1999, Version 5.2, Numerical analysis software from Math Works, Inc., Natick, MA.
9. Moulton, T., 1997, "Analysis and Design of ElectroThermal-Compliant Micro Devices," Center for Sensor Technologies at the University of Pennsylvania technical report # TR-CST31DEC97, pp. 13-26.
10. MUMPs, 1999, See Cronos.
11. Sigmund, O., 1998, "Topology Optimization in Multiphysics Problems," 7th A/AA/USAF/NASA/ISSMO Symposium, Vol. 3, St Louis, August 1998, pp. 1492-1500.
12. Sigmund, O., 1997, "Design of Thermomechanical Actuators Using Topology Optimization," Second World Congress on Structural and Multidisciplinary Optimization, Zakopane, Poland, May 1997, pp. 393-398.
13. Sun, X.-Q, Gu, X., and Carr, W.N., 1996, "Lateral InPlane Displacement Microactuators with Combined Thermal and Electrostatic Drive," Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, June 1996, pp. 152-155.
14. Takeshima, N. and Fujita, H., 1991, "Polylmide Bimorph Actuators for a Ciliary Motion system. " Micromechanical Sensors, Actuators, and Systems, pp. 203-209.
15. Timoshenko, S.P. and Goodier, J.N., 1951, Theory of Elasticity, 2nd Edition, McGraw-Hill, NY.