Linear microactuators based on the shape memory effect

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 785-788

  Kohl, M ^a   Skrobanek, K D ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; ELECTRIC PROPERTIES; ELECTROOPTICAL DEVICES; LIGHT TRANSMISSION; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; PHASE TRANSITIONS; SEMICONDUCTOR DEVICE MANUFACTURE; SHAPE MEMORY EFFECT;

INTEGRATED OPTICAL DETECTION OF MOTION; LINEAR MICROACTUATORS;

ACTUATORS;

EID: 0030699807     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)