Thin film pyroelectric arrays as infra-red detectors

Integrated Ferroelectrics

Volumn 17, Issue 1-4, 1997, Pages 359-367

  Kohli, Markus ^a   Seifert, Andreas ^a   Willing, Bert ^a   Brooks, Keith ^a   Muralt, Paul ^a  

^a EPFL   (Switzerland)

Author keywords

Arrays; Ca modified lead titanate; Poling; Pyroelectricity; PZT infra red detectors; Thin films

Indexed keywords

CALCIUM; DOPING (ADDITIVES); INFRARED DETECTORS; LEAD COMPOUNDS; PHOTOLITHOGRAPHY; POROSITY; PYROELECTRICITY; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SUBSTRATES; THIN FILM DEVICES; VOLTAGE MEASUREMENT;

LEAD ZIRCONATE TITANATE;

DIELECTRIC FILMS;

EID: 0031352495     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589708013010     Document Type: Article

References (14)

1. R. W. Whatmore, A. Patel, N. M. Shorrocks et al., Ferroelectrics 104, 269-283 (1990).
2. R. Takayama, Y. Tomita, K. Iijima et al., Journal of Applied Physics 63, 5868-5872 (1988).
3. M. Kohli, Y. Huang, T. Maeder et al., Microelectronic Engineering 29, 93-96 (1995).
4. N. M. Shorrocks, A. Patel, M. J. Walker et al., Microelectronic Engineering 29, 59-66 (1995).
5. D. L. Polla, P. F. Baude, L. Pham et al., SPIE 2552 (1995).
6. N. Yoshiike, K. Morinaka, K. Hashimoto et al., in Transducers'95, Eurosensor IX, Stockholm, Sweden, 108-110 (1995).
7. P. Muralt, Revue de l'électricité et de l'électronique 9, 56-63 (1996).
8. K. Brooks, I. Reaney, R. Klissurska et al., Journal of Material Research 9, 2540-2553 (1994).
9. A. Seifert, P. Muralt, and N. Setter, in Electroceramics V, Aveiro, Portugal, 329-332 (1996).
10. Y. H. Huang, science technique Thesis, EPFL, 1995.
11. P. Muralt, T. Maeder, S. Scalese et al., Le vide 279, 45-47 (1996).
12. M. E. Lines and A. M. Glass, Principles and Applications of Ferroelectrics an Related Materials (Oxford Univ. Press, Oxford, 1977).
13. M. Kohli, C. Wuethrich, K. Brooks et al., Sensors and Actuators A (in press).
14. B. Willing, M. Kohli, K. Brooks et al., Ferroelectrics (in press).