Chapter 5 Monolithic Pyroelectric Bolometer Arrays

Semiconductors and Semimetals

Volumn 47, Issue C, 1997, Pages 175-201

  Polla, Dennis L ^a   Choi, Jun R ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PYROELECTRIC BOLOMETERS;

EID: 0002925107     PISSN: 00808784     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S0080-8784(08)62691-5     Document Type: Article

References (58)

1. Barth, P. W. (1995). Rec. Int. Conf. Solid State Sens. Actuators (Transducers '95), 8th, Stockholm, p. 276
2. Budd K.D., Dey S.K., and Payne D.A. Proc. Br. Ceram. Soc. 36 (1985) 107
3. Byer R.L., and Roundy C.B. Ferroelectrics 3 (1972) 333
4. Campbell S.A. "The Science and Engineering of Microelectronics Fabrication." (1996), Oxford University Press, New York
5. Chau K.H.-L., et al. Rec. Int. Conf. Solid State Sen. Actuators (1995) 593 (Transducers '95), 8th, Stockholm
6. Choi J.R., and Polla D.L. J. Micromech. Microeng. 3 (1993) 60-64
7. Cooney T.G., Glumac D.E., Robbins W.P., and Francis L.F. Mater. Res. Soc. Symp. Proc. 360 (1994) 401
8. Fan L.S., and Muller R.S. Rec. IEEE Solid State Sens. Actuators Workshop (1988) 55
9. Fung C.D., Cheung P.W., and Ko W.H. "Micromachining and Micropackaging of Transducers." (1985), Elsevier, Amsterdam
10. Gardner J.W. "Microsensors Principles and Applications." (1994), Wiley, New York
11. Gray P.G., and Meyer R.G. "Analysis and Design of Analog Integrated Circuits." (1993), Wiley, New York
12. Guckel H. IEEE Trans. Electron Devices ED-35 (1988) 800
13. Harrold S.J. "An Introduction to GaAs IC Design." (1993), Prentice Hall, New York
14. Hornbeck L.J. Proc. Soc. Photo-Opt. Instrum. Eng. 1150 (1989) 86
15. Howe R.T. J. Vac. Sci Technol. B 6 2 (1988) 1809
16. Howe R.T., and Muller R.S. J. Appl. Phys. 54 (1983) 4674
17. Hsueh C.-C., Tamagawa T., Ye C., Helgeson A., and Polla D.L. Rec. Int. Symp. Integ. Ferroelect., 3rd. (1991)
18. Hsueh C.-C., Tamagawa T., Ye C., Helgeson A., and Polla D.L. Integr. Ferroelectr. 3 (1993) 21
19. Jerman H. Rec. Solid State Sen. Actuator Workshop (1990) 65
20. Ko W.H., Bao M.-H., and Hong Y.-D. IEEE Trans. Electron Devices ED-29 (1982) 48
21. Lahiji G.R., and Wise K.D. IEEE Trans. Electron Devices ED2-9 (1982) 14
22. Lebbink G.K. "Microsystems Technology Exploring Opportunities." (1994), Stichting Toekomstbeeld der Techniek, Den Haag
23. Lee Y.S., and Wise K.D. IEEE Trans. Electron Devices ED-17 (1982) 927
24. Lin C.T., Scanlan B.W., McNeill Webb J.D., Li L., Lipeles R.A., Adams P.M., and Leung M.S. J. Mater. Res. 7 9 (1992) 2546
25. Liu S.T. Ferroelectrics 10 (1976) 83
26. Liu S.T., Zook J.D., and Long D. Ferroelectrics 9 (1975) 39
27. Mehregany M., Howe R.T., and Senturia S.D. J. Appl. Phys. 62 (1987) 3579
28. Middelhoek S., and Audet S.A. "Silicon Sensors." (1989), Academic Press, London
29. Muller R.S., Polla D.L., and White R.M. IEEE ElectroTechnol. Rev. 1 (1985) 56-58
30. Muller R.S., Howe R.T., Senturia S.D., Smith R.L., and White R.M. "Microsensors." (1990), IEEE Press, New York
31. Obermeier E., Kopystynski P., and Niessel R. Rec. IEEE Solid Slate Sens. Workshop (1986) 40
32. Pan P., and Berry W. J. Electrochem. Soc. 132 (1985) 3001
33. Petersen K.E. Proc. IEEE 70 (1982) 420-457
34. Pham L., and Polla D.L. IEEE Trans. Ultrason. Ferroelectr. Freq. Control UFFC-41 (1994) 552
35. Polla D.L., Muller R.S., and White R.M. IEEE Int. Electron Devices Meet. (1983)
36. Polla D.L., Muller R.S., and White R.M. Rec. IEEE Ultrason. Symp. (1985) 495-498
37. Polla D.L., Yoon H., Tamagawa T., and Voros K. IEEE Int. Electron Devices Meet. (1989)
38. Polla, D. L., Tamagawa, T., and Choi, J. R. (1990). Int. Symp. Circuits Syst., New Orleans, 1990.
39. Polla D.L., Ye C., and Tamagawa T. Appl. Phys. Lett. 59 (1991) 3539
40. Polla D.L., Ye C., and Pham L. Rec. IRIS Detect. Spec. Group Meet. (1993)
41. Ristic L. "Sensor Technology and Devices." (1994), Artech House, Norwood, MA.
42. Rockstad H.K. Rec. Int. Conf. Solid State Sens. Actuators (Transducers '93), 8th (1993) 836
43. Roylance L.M., and Angeli J.B. IEEE Trans. Electron Devices ED-26 (1979) 1911
44. Sampsell J.B. Rec. Int. Conf. Solid State Sens. Actuators (Transducers '93), 8th (1993) 24
45. Sansen W., Huijsing J.H., and van de Plassche R.J. "Analog Circuit Design." (1994), Kluwer, Boston
46. Seidel H. Rec. Int. Conf. Solid Stale Sens. Actuators, 4th (1987) 120-125
47. Sekimoto M., Yoshihara H., and Ohkubo T. J. Vac. Sci. Technol. 21 (1982) 1017
48. Shorrocks N.M., Patel A., Walker M.J., and Parsons A.D. Miocroelectron. Eng. 29 (1995) 59
49. Sze S.M. "VLSI Technology." (1988), McGraw-Hill, New York
50. Sze S.M. "Semiconductor Sensors." (1994), Wiley, New York
51. Tamagawa, T., Polla, D. L., and Hsueh, C.-C. (1990). IEEE Int. Electron Devices Meet., San Francisco
52. Watton R. Ferroelectrics 91 (1989) 87
53. Whatmore R.W., Patel A., Shorrocks N.M., and Ainger F.W. Ferroelectrics 104 (1990) 269
54. Whatmore R.W., Kirby P., Patel A., Shorrocks N.M., Bland T., and Walker M. In: Auciello O., and Waser R. (Eds). Science and Technology of Electroceramic Thin Films" (1995), Kluwer, The Netherlands
55. Wolf S., and Tauber R.N. "Silicon Processing for the VLSI Era," Vols. 1-3 (1986), Lattice Press, Sunset Beach, CA
56. Ye C., and Polla D.L. Ferroelectrics 157 (1994) 347
57. Ye C., Tamagawa T., Schiller P., and Polla D.L. Sens. Actuators, A: Phys. 35 (1991) 77
58. Ye C., Tamagawa T., and Polla D.L. J. Appl. Phys. 71 (1991) 5538