Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 109-113

  Willing, Bert ^a   Kohli, Markus ^a   Muralt, Paul ^a   Setter, Nava ^a   Oehler, Oscar ^b  

^a EPFL   (Switzerland)

^b Oehler und Fischer AG   (Switzerland)

Author keywords

Gas spectrometers; Pyroelectrics; Thin film arrays

Indexed keywords

PIEZOELECTRIC TRANSDUCERS; PYROELECTRICITY; SILICON SENSORS; SPECTROMETERS; THIN FILM DEVICES;

GAS SPECTROMETRY; PYROELECTRIC THIN FILM ARRAYS;

CHEMICAL SENSORS;

EID: 0032049294     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01736-6     Document Type: Article

References (13)

1. R.W. Whatmore, A. Patel, N.M. Shorrocks, F.W. Ainger, Ferroelectric materials for thermal IR sensors. State of the an and perspective, Ferroelectrics 104 (1990) 269-283.
2. 3 thin films, J. Appl. Phys. 63 (1988) 5868-5872.
3. 3, thin films, J. Appl. Phys. 61 (1987) 411-415.
4. A. Bell, Y. Huang, O. Paul, A. Nemirovsky, N. Setter, A thin film pyroelectric detector, Integrated Ferroelectrics 6 (1995) 231-240.
5. P. Murait, PZT thin films for sensor and actuators, Rev. Electricité Electronique 9 (1996) 56-63.
6. 3 thin films for pyroelectric detection, Proc. Int. Symp, Applications of Ferroelectrics, Pennsylvania State University, PA, USA, 1994, pp. 691-694.
7. 3 thin films, Proc. 3rd Euro-Ceramics Conf., San Vincento, Italy, 1993, pp. 699-704.
8. 3 thin films for pyroelectric applications, Diss. EPF No. 1343, Département des Matériaux, EPFL, Lausanne, 1995.
9. P.Muralt, K. Brooks, M. Kohli, T. Maeder, C. Wüthrich, Ferroelectric thin films for microsystems, Proc. 6th Eur. Conf. Applied Surface and Interface Analysis, Montreux, Switzerland, 1995, pp. 115-122.
10. M. Kohli, Y. Huang, T. Maeder, C. Wüthrich, A. Bell, P. Muralt, N. Setter, P. Ryser, M. Forster, Processing and properties of thin film pyroelectric devices, Microelectronic Eng. 29 (1995) 93-96.
11. M. Kohli, C. Wüthrich, K. Brooks, B. Willing, M. Forster, P. Muralt, N. Setter, P. Ryser, Pyroelectric thin-film sensor array, Sensors and Actuators A 60 (1997) 147-153.
12. A. Hossain, M.H. Rashid, Pyroelectric detectors and their application, IEEE Trans. Industrial Appl. 27 (1991) 824-829.
13. W. Lang, K. Kühl, H. Sandmaier, Absorbing layers for thermal infrared detectors. Sensors and Actuators A 34 (1992) 243-248.