Thin film pyroelectric array as a detector for an infrared gas spectrometer

Infrared Physics and Technology

Volumn 39, Issue 7, 1998, Pages 443-449

  Willing, B ^a   Kohli, M ^a   Muralt, P ^a   Oehler, O ^b  

^a EPFL   (Switzerland)

^b Oehler und Fischer AG   (Switzerland)

Author keywords

Gas spectrometer; Pyroelectrics; Silicon micromachining; Thin films

Indexed keywords

ARRAYS; MICROPROCESSOR CHIPS; PYROELECTRICITY; SOL-GELS; THERMAL INSULATION; THIN FILMS;

GAS SPECTROMETERS;

INFRARED SPECTROMETERS;

EID: 0032315929     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(98)00036-X     Document Type: Article

References (11)

1. 3 thin films, J. Appl. Phys. 63 (1988) 5868-5872.
2. 3 thin films, J. Appl. Phys. 61 (1987) 411-415.
3. A. Bell, Y. Huang, O. Paul, A. Nemirovsky, N. Setter, A thin film pyroelectric detector, Integrated Ferroelectrics 6 (1995) 231-240.
4. P. Muralt, PZT thin films for sensor and actuators, Rev. Electricité Electronique 9 (1996) 56-63.
5. 3 thin films for pyroelectric detection, Proc. Int. Symp. Applications of Ferroelectrics, PA, USA, 1994, pp. 691-694.
6. P. Muralt, K. Brooks, M. Kohli, T. Maeder, C. Wüthrich, Ferroelectric Thin Films for Microsystems, Proc. 6th Europ. Conf. Applied Surface and Interface Analysis, Montreux, Switzerland, 1995.
7. M. Kohli, Y. Huang, T. Maeder, C. Wüthrich, A. Bell, P. Muralt, N. Setter, P. Ryser, M. Forster, Processing and properties of thin film pyroelectric devices, Microelectronic Eng. 29 (1995) 93-96.
8. M. Kohli, C. Wüthrich, K. Brooks, B. Willing, M. Forster, P. Muralt, N. Setter, P. Ryser, Pyroelectric thin-film sensor array, Sensors and Actuators A 60 (1997) 147-153.
9. A. Hossain, M.H. Rashid, Pyroelectric detectors and their application, IEEE Trans. on Industrial Applications 27 (5) (1991) 824-829.
10. W. Lang, K. Kühl, H. Sandmaier, Absorbing layers for thermal infrared detectors, Sensors and Actuators A 34 (1991) 243-248.
11. P. Campani, C.S. Fang, H.W. Prengle Jr., Infrared absorption coefficients for certain pollutant gases, Applied Spectroscopy 26 (1972) 372-378.