Pyroelectric thin-film sensor array

Sensors and Actuators, A: Physical

Volumn 60, Issue 1-3, 1997, Pages 147-153

  Kohli, Markus ^a   Wuethrich, Christian ^a   Brooks, Keith G ^a   Willing, Bert ^a   Forster, Martin ^b,c   Muralt, Paul ^a   Setter, Nava ^a   Ryser, Peter ^b  

^a EPFL   (Switzerland)

^b Siemens Schweiz AG   (Switzerland)

^c Swiss Natl Inst of Nucl Research   (Switzerland)

Author keywords

Ferroelectric materials; Pyroelectric detectors; Sensor arrays; Thin film sensors

Indexed keywords

ARRAYS; CALCULATIONS; CURRENT VOLTAGE CHARACTERISTICS; DEPOSITION; FERROELECTRIC MATERIALS; FINITE ELEMENT METHOD; MEMBRANES; PYROELECTRICITY; SEMICONDUCTING SILICON COMPOUNDS; SOL-GELS; THIN FILMS;

PYROELECTRIC DETECTORS; SENSOR ARRAYS; THIN FILM SENSORS;

SENSORS;

EID: 0031144385     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01484-2     Document Type: Article

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