Low-temperature preparation of perovskite Pb(Sc0.5Ta0.5) O3 thin films using MOCVD

Materials Letters

Volumn 28, Issue 1-3, 1996, Pages 17-20

  Liu, Donhang ^a   Chen, Haydn ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Ferroelectric; Imaging; Lead scandium tantalate; Low temperature deposition; MOCVD; Perovskite; Pyroelectric; Silicon substrates; Thin films

Indexed keywords

CRYSTAL STRUCTURE; FERROELECTRIC MATERIALS; FILM GROWTH; FILM PREPARATION; IMAGING TECHNIQUES; LEAD COMPOUNDS; LOW TEMPERATURE OPERATIONS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE; PYROELECTRICITY; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

FILM STRUCTURE; LEAD SCANDIUM TANTALATE; LOW TEMPERATURE PREPARATION; SILICON SUBSTRATE;

THIN FILMS;

EID: 0030243168     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-577X(96)00029-8     Document Type: Article

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