Particle-in-cell plus direct simulation monte carlo (PIC-DSMC) approach for self-consistent plasma-gas simulations

IEEE Transactions on Plasma Science

Volumn 27, Issue 5, 1999, Pages 1389-1398

  Serikov, Vladimir V ^a   Kawamoto, Shinji ^a   Nanbu, Kenichi ^a  

^a NIPPON SHEET GLASS CO LTD   (Japan)

Author keywords

Direct simulation monte carlo method; Discharge plasma; Gas heating; Particle in cell simulation; Selfconsistent model

Indexed keywords

PARTICLE-IN-CELL (PIC) SIMULATION;

ALGORITHMS; COMPUTER SIMULATION; ELECTRIC DISCHARGES; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; PLASMA FLOW; PLASMA HEATING;

PLASMA SIMULATION;

EID: 0033204521     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.799817     Document Type: Article

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