Sputtered atom transport in high-current gas discharges: A self-consistent computer simulation study

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 11, Issue 3, 1993, Pages 676-681

  Urbassek, Herbert M ^a   Sibold, Dieter ^b  

^a FB Physik Universitdt Dortmund   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CYLINDRICAL MODELS; DIRECT SIMULATION MONTE CARLO; EXPERIMENTAL DATUM; HIGH-CURRENT DISCHARGES; INITIAL CONDITIONS; LOW-CURRENT DISCHARGES; SELF-CONSISTENT COMPUTER SIMULATION; SPUTTERED PARTICLES;

BOLTZMANN EQUATION; COMPUTER SIMULATION;

CATHODES;

EID: 21144465503     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.578790     Document Type: Article

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