Measurements of electron temperature, electron density, and neutral density in a radio-frequency inductively coupled plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 144-151

  Hori, T ^a   Bowden, M D ^a   Uchino, K ^a   Muraoka, K ^a   Maeda, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030551131     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579911     Document Type: Article

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