Gas density reduction effects in magnetrons

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 6, Issue 1, 1988, Pages 19-24

  Rossnagel, S M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84950555774     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.574988     Document Type: Article

References (18)

1. D. W. Hoffman, J. Vac. Sci. Technol. A 3, 561 (1985).
2. E. H. Kennard, Kinetic Theory of Gases (McGraw-Hill, New York, 1938), p. 311.
3. S. Smoluchowski, Ann. Phys. 64, 101 (1898).
4. M. Knudsen, Ann. Phys. 34, 593 (1911).
5. J. F. O'Hanlon, A User's Guide to Vacuum Technology (Wiley, New York, 1980), p. 20.
6. T. Takaishi and Y. Sensui, Trans. Faraday Soc. 59, 2509 (1963).
7. K. F. Poulter, M. J. Rodgers, P. J. Nash, T. J. Thompson, and M. P. Perkin, Vacuum 33, 311 (1983).
8. M. C. I. Sui, J. Vac. Sci. Technol. 2, 368 (1973).
9. G. C. Baldwin and M. R. Gaerttner, J. Vac. Sci. Technol. 10, 215 (1973).
10. G. A. Miller and R. L. Buice, Jr., J. Phys. Chern. 70, 3874 (1966).
11. T. Edmonds and J. P. Hobson, J. Vac. Sci. Technol. 2, 182 (1965).
12. J. P. Hobson, J. Vac. Sci. Technol. 6, 257 (1969).
13. W. Jitschin and P. Rohl, J. Vac. Sci. Technol. A 5, 372 (1987).
14. R. S. Robinson, J. Vac. Sci. Technol. 16, 185 (1979).
15. J. Dembowski, H. Oechsner, Y. Yamamura, and M. Urbassek, Nucl. Instrum. Methods B 18, 464 (1987).
16. S. M. Rossnagel and H. R. Kaufman, J. Vac. Sci. Technol. A (in press).
17. J. A. Thornton and D. W. Hoffman, J. Vac. Sci. Technol. A 3, 576 (1985).
18. D. W. Hoffman, Thin Solid Films 107, 353 (1983).