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Volumn 23, Issue 4, 1995, Pages 581-590

Two-Dimensional Direct Simulation Monte Carlo (DSMC) of Reactive Neutral and Ion Flow in a High Density Plasma Reactor

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CHLORINE; ELECTRIC FIELDS; ETCHING; IONS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PLASMA DENSITY; PLASMA FLOW; PLASMA SIMULATION; SILICON;

EID: 0029357051     PISSN: 00933813     EISSN: 19399375     Source Type: Journal    
DOI: 10.1109/27.467978     Document Type: Article
Times cited : (81)

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