The analysis of background gas heating in direct current sputtering discharges via particle simulation

Journal of Applied Physics

Volumn 82, Issue 12, 1997, Pages 5948-5957

  Serikov, Vladimir V ^a   Nanbu, Kenichi ^b  

^a NIPPON SHEET GLASS CO LTD   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; CALCULATIONS; CHARGED PARTICLES; COMPUTER SIMULATION; ELECTRIC DISCHARGES; ELECTRIC FIELD EFFECTS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA SIMULATION; SPUTTERING;

BACKGROUND GAS HEATING; DIRECT CURRENT SPUTTERING DISCHARGES; ENERGETIC CHARGE EXCHANGE NEUTRALS; ENERGETIC PARTICLE TRANSPORT; PARTICLE SURFACE INTERACTIONS; THERMALIZATION VELOCITY THRESHOLD;

GAS HEATING;

EID: 0031374015     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366497     Document Type: Article

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