Model of energetic electron transport in magnetron discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 1, 1990, Pages 30-37

  Sheridan, T E ^a   Goeckner, M J ^a   Goree, J ^a  

^a UNIVERSITY OF IOWA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84957231755     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.577093     Document Type: Article

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