Monte Carlo calculations of gas rarefaction in a magnetron sputtering discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 4, 1995, Pages 2161-2169

  Turner, G M ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 21844496176     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579537     Document Type: Article

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