A sputtering wind

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 3, Issue 3, 1985, Pages 561-566

  Hoffman, D W ^a  

^a FORD MOTOR COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000807120     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.572994     Document Type: Article

References (10)

1. D. W. Hoffman, Thin Solid Films 107, 353 (1983).
2. R. S. Robinson, J. Vac. Sci. Technol. 16, 185 (1979).
3. R. E. Somekh, J. Vac. Sci. Technol. A 2, 1285 (1984); Vacuum 34, 987 (1984).
4. G. K. Wehner and G. S. Anderson, in Handbook of Thin Film Technology, edited by L. J. Maissel and R. Glang(McGraw-Hill, New York, 1970), pp. 3-1-3-38.
5. G. Carter and J. S. Colligon, Ion Bombardment of Solids (American Elsevier, New York, 1968), pp. 6–37.
6. I. Langmuir, J. Franklin Inst. 196, 751 (1923).
7. T. Dote and M. Shimada, J. Phys. Soc. Jpn. 52, 2025 (1983).
8. D. W. Hoffman, Thin Solid Films 96, 217 (1982); Proceedings of the 7th International Conference on Vacuum Metallurgy (Iron and Steel Institute of Japan, Tokyo, 1982), p. 145.
9. G. N. Patterson, Introduction to the Kinetic Theory of Gas Flows (University of Toronto, Toronto, 1971), pp. 99–178.
10. A. B. Cambel in Handbook of Fluid Dynamics, edited by V. L. Streeter (McGraw-Hill, New York, 1961), pp. 8-1-8-70.