Micromachined planar inductors on silicon wafers for MEMS applications

IEEE Transactions on Industrial Electronics

Volumn 45, Issue 6, 1998, Pages 866-876

  Ahn, Chong H ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Inductor; Integrated inductor; Magnetic microactuator; Magnetic microelectromechanical systems; Magnetic microsensor; Micromachining technique; Planar inductor; Solenoid inductor; Spiral inductor; Toroidal meander

Indexed keywords

CMOS INTEGRATED CIRCUITS; MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SILICON WAFERS;

MICROMACHINED PLANAR INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0032294311     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/41.735330     Document Type: Article

References (40)

1. K. Yanagisawa, A. Tago, T. Ohkubo, and H. Kuwano, "Magnetic micro-actuator," in Proc. 4th IEEE Workshop on Microelectromechnical Systems, Nara, Japan, 1991, pp. 120-124.
2. H. Guckel, K. J. Skrobis, T. R. Christenson, J. Klein, S. Han, B. Choi, E. G. Novell, and T. W. Chapman, "On the application of deep X-ray lithography with sacrificial layers to sensor and actuator construction," J. Micromech. Microeng., vol. 1, no. 4, pp. 135-138, 1991.
3. B. Wagner, M. Kreutzer, and W. Benecke, "Linear and rotational magnetic micromotors fabricated using silicon technology," in Proc. IEEE Microelectromechanical Systems Workshop, 19, pp. 183-189.
4. C. H. Ahn and M. G. Allen, "A fully integrated micromagnetic actuator with a multilevel meander magnetic core," in Proc. IEEE Solid-State Sensors and Actuators Workshop, 19, pp. 14-18.
5. I. J. Busch-Vishniac, "The case for magnetically driven microactuators," Sens. Actuators, vol. A33, pp. 207-220, 1992.
6. C. Liu, T. Tsao, Y. C. Tai, and C. M. Ho, "Surface micromachined magnetic actuators," in Proc. IEEE Microelectromechanical Systems Workshop, 19, pp. 57-62.
7. F. Cardot, J. Gobot, M. Bodgdanski, and F. Rudolf, "Fabrication of a magnetic transducer composed of a high-density array of micromagnets with on-chip electronics," Sens. Actuators, vol. A43, pp. 11-16, 1994.
8. R. Miller, G. Burr, Y. C. Tai, and D. Psaltis, "Magnetically actuated micromirror use as optical deflectors," in Proc. Electrochemical Soc. Meeting, Oct. 1995, vol. 95-18, pp. 474-480.
9. M. Kimura, N. Miyakoshi, and M. Diabow, "A miniature opto-electric transformer," in Proc. IEEE Microelectromechanical Systems Workshop, 19, pp. 227-232.
10. M. Mino, T. Yachi, A. Tago, K. Yanagisawa, and K. Sakakibara, "A new planar transformer for use in micro-switching converters," IEEE Trans. Magn., vol. 28, pp. 1969-1973, July 1992.
11. C. H. Ahn, Y. J. Kim, and M. G. Allen, "A fully integrated micromachined toroidal inductor with a nickel-iron magnetic core (switched dc/dc converter application)," in Proc. Transducers, 6th Int. Conf. SolidState Sensors and Actuators, 19, pp. 70-73.
12. A. Olivei, "Optimized miniature thin-film planar inductors compatible with integrated circuits," IEEE Trans. Parts, Mater., Packag., vol. PMP5, no. 2, pp. 71-88, 1969.
13. H. M. Greenhouse, "Design of planar rectangular microelectronic inductors," IEEE Trans. Parts, Mater. Packag., vol. PMP10, pp. 101-109, June 1974.
14. R. Rodriguez, J. M. Dishman, F. D. Dickens, and E. W. Whelan, "Modeling of two-dimensional spiral inductors," IEEE Trans. Comp., Hybrids, Manufact. Technol, vol. CHMT3, pp. 535-541, Dec. 1980.
15. W. A. Roshen and D. E. Turcotte, "Planar inductors on magnetic substrate," IEEE Trans. Magn., vol. 24, pp. 3213-3216, Nov. 1988.
16. O. Oshiro, H. Tsujimoto, and K. Shirae, "A novel miniature planar inductor," IEEE Trans. Magn., vol. MAG23, pp. 3759-3761, Sept. 1987.
17. K. Kawabe, H. Koyama, and K. Shirae, "Planar inductors," IEEE Trans. Magn., vol. MAG20, pp. 1804-1806, 1984.
18. M. Yamaguichi, M. Matsumoto, H. Ohzeki, and K. I. Aral, "Fabrication and basic characteristics of dry-etched micro inductors," IEEE Trans. Magn., vol. 26, pp. 2014-2016, 1990.
19. L. T. Romankiw, I. Croll, and M. Hatzaki, "Batch fabricated thin film magnetic recording heads," IEEE Trans. Magn., vol. 6, pp. 579-599, May 1970.
20. Y. Miura, T. Takahashi, F. Kume, J. Toda, S. Tsutsumi, and S. Kawakami, "Fabrication of multi-turn thin film head," IEEE Trans. Magn., vol. MAG16, pp. 779-881, Sept. 1980.
21. Y. Noro, I. Ohshima, M. Saito, M. Yamada, and K. Tanaka, "Fabrication of multitrack thin-film head," J. Appl. Phys., vol. 53, no. 3, pp. 2611-2613, Mar. 1982.
22. M. Yamaguchi, "Characterization and analysis of a thin film character with closed magnetic circuit structure," IEEE Trans. Magn., vol. 28, pp. 3015-3017, 1992.
23. C. H. Ahn and M. G. Allen, "A planar micromachined spiral inductor for magnetic microactuator applications," J. Micromech. Microeng., vol. 3, pp. 1-9, 1993.
24. C. H. Ahn, Y. J. Kim, and M. G. Allen, "A fully integrated planar toroidal inductor with a micromachined nickel-iron bar," IEEE Transactions Comp., Packag., Manufact. Technol., vol. 17, pp. 463-169, Sept. 1994.
25. C. H. Ahn and M. G. Allen, "A new toroidal-meander type integrated inductor with a multilevel meander magnetic core," IEEE Trans. Magn., vol. 30, pp. 73-79, Jan. 1994.
26. R. L. Anderson, A. Gangulee, and L. T. Romankiw, "Annealing behavior of electroplated permalloy thin film," J. Electron. Mater., vol. 2, no. 2, pp. 161-176, 1973.
27. A. B. Frazier and M. G. Allen, "High aspect ratio electroplated microstructures using a photosensitive polyimide process," IEEE J. Microelectromech. Syst., vol. 2, pp. 87-94, June 1993.
28. A. B. Frazier, C. H. Ahn, and M. G. Allen, "Development of micromachined devices using polyimide-based processes," Sens. Actuators, vol. A45, pp. 47-55, 1994.
29. C. H. Ahn, "Micromachined components as integrated inductors and magnetic microactuators," Ph.D. dissertation, Dep. Elect. Comput. Eng., Georgia Inst. Technol., Atlanta, 1993.
30. R. F. Soohoo, "Magnetic thin film inductors for integrated circuit application," IEEE Trans. Magn., vol. MAG15, pp. 1803-1805, Nov. 1979.
31. S. Kawahito, Y. Sasaki, M. Ashiki, and T. Nakamura, "Micromachined solenoid for highly sensitive magnetic sensors," in Proc. Transducers, 6th Int. Conf. Solid-State Sensors and Actuators, San Francisco, CA, June 1991, pp. 1077-1080.
32. R. Jensen, J. Cummings, and H. Vora, "Copper/polyimide materials system for high performance packaging," IEEE Trans. Comp., Hybrids, Manufact. Technol., vol. 7, pp. 384-393, Dec. 1990.
33. N. Iwasaki and S. Yamaguchi, "A pillar shaped via structure in a Cupolyimide multilayer substrate," IEEE Trans. Comp., Hybrids, Manufact. Technol., vol. 13, pp. 440-143, no. 2, June 1990.
34. I. W. Wolf, "Electrodeposition of magnetic materials," J. Appl. Phys., vol. 33, no. 3, pp. 1152-1159, Mar. 1962.
35. M. E. Henstock and E. S. Spencer-Timms, "The composition of thin electrodeposited alloy films with special reference to nickel-iron," in Proc. 6th Int. Metal Finishing Conf., 19, pp. 179-185.
36. C. H. Ahn and M. G. Allen, "A fully integrated surface micromachined magnetic with a microactuator meander magnetic core," IEEE J. Microelectromech. Syst., vol. 2, pp. 15-22, Mar. 1993.
37. C. H. Ahn, Y. J. Kim, and M. G. Allen, "A planar variable reluctance magnetic micromotor with fully integrated stator and coils," IEEE J. Microelectromech. Syst., vol. 2, pp. 165-173, Dec. 1993.
38. C. H. Ahn and M. G. Alien, "Fluid micropumps based-on rotary magnetic actuators," in Proc. IEEE Microelectromechanical Systems Workshop, Amsterdam, The Netherlands, Jan. 30-Feb. 2, 1995, pp. 408-412.
39. "A comparison of two micromachined inductors for fully integrated boost DC/DC power converters," IEEE Trans. Power Electron., vol.11, pp. 1-7, Mar. 1994.
40. "A fully integrated micromachined magnetic particle manipulator and separator," in Proc. IEEE Microelectromechanical Systems Workshop, Japan, Jan. 25-28, 1994, pp. 35-41.