A planar micromachined spiral inductor for integrated magnetic microactuator applications

Journal of Micromechanics and Microengineering

Volumn 3, Issue 2, 1993, Pages 37-44

  Ahn, Chong H ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATED HIGH PERMEABILITY NICKEL IRON MAGNETIC CORE; INTEGRATED MAGNETIC MICROACTUATOR; PLANAR MICROMACHINED SPIRAL INDUCTOR;

ACTUATORS; ELECTRIC CONDUCTORS; ELECTRIC WINDINGS; INTEGRATED CIRCUITS; MAGNETIC CORES; MAGNETIC HEADS; MICROMACHINING; SEMICONDUCTOR DEVICE STRUCTURES; STRUCTURE (COMPOSITION);

ELECTRIC INDUCTORS;

EID: 0027618136     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/3/2/001     Document Type: Article

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