Micromachined solenoids for highly sensitive magnetic sensors

Transducers '91

Volumn , Issue , 1991, Pages 1077-1080

  Kawahito, S ^a   Sasaki, Y ^a   Ashiki, M ^a   Nakamura, T ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY - ELECTRON BEAM; METAL CUTTING - MICROMACHINING; SENSORS - SILICON SENSORS; SUBSTRATES;

FLUX FEEDBACK MAGNETIC SENSOR; FLUXGATE SENSOR; MICROMACHINED SOLENOIDS; VECTOR MAGNETIC SENSORS;

MAGNETOMETERS;

EID: 0026382514     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)