Fabrication and testing of the planar magnetic micromotor

Journal of Micromechanics and Microengineering

Volumn 1, Issue 3, 1991, Pages 135-138

  Guckel, H ^a   Skrobis, K J ^a   Christenson, T R ^a   Klein, J ^a   Han, S ^a   Choi, B ^a   Lovell, E G ^a   Chapman, T W ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS CONTROLLERS; MAGNETIC MICROMOTORS; MICROMOTORS; PLANAR MICROMOTORS;

ELECTROSTATIC DEVICES; INTEGRATED CIRCUITS, CMOS; LITHOGRAPHY--X-RAY; MAGNETIC DEVICES;

ELECTRIC MOTORS, RELUCTANCE TYPE;

EID: 0026224258     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/1/3/001     Document Type: Article

References (7)