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Sensors and Actuators: A. Physical

Volumn 45, Issue 1, 1994, Pages 47-55

Development of micromachined devices using polyimide-based processes

(3) Frazier, A Bruno a Ahn, Chong H a Allen, Mark G a

a GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Micromachined devices; Polyimide based processes

Indexed keywords

ELECTROPLATING; INTEGRATED CIRCUIT MANUFACTURE; METALLOGRAPHIC MICROSTRUCTURE; MICROMACHINING; PHOTORESISTS; POLYIMIDES; THERMODYNAMIC STABILITY;

CHEMICAL STABILITY; HIGH ASPECT RATIO; MICROMACHINED DEVICES; PHOTO ELECTROFORMING TECHNOLOGY; POLYIMIDE BASED PROCESS; STENCIL BASED TECHNOLOGY;

ACTUATORS;

EID: 0028527810 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(94)00800-0 Document Type: Article

Times cited : (43)

References (40)

1
- 0022717983
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
- (1986) Microelectronic Eng. , vol.4 , pp. 35-56
- Becker¹ Ehrfeld² Hagmann³ Maner⁴ Munchmeyer⁵

2
- 84918676404
- W. Ehrfeld, P. Bley, F. Gotz, P. Hagmann, A. Maner, J. Mohr, H.O. Moser, D. Munchmeyer, W. Schelb, D. Schmidt and E.W. Becker, Fabrication of microstructures using the LIGA process, Proc. 1987 IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, USA, Nov. 9–11, 1987

3
- 84918687134
- H. Guckel, T.R. Christenson, K.J. Skrobis, D.D. Denton, B. Choi, E.G. Lovell, J.W. Lee, S.S. Bajikar and T.W. Chapman, Deep X-ray and UV lithographies for micromechanics, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June 4–7, 1990, pp. 118–122

4
- 84918704622
- W. Menz, W. Backer, M. Harmening and A. Michel, The Liga technique: a novel concept for microstructures and the combination with SI-technologies by injection molding, Proc. 1991 IEEE Microelectromechanical Systems Conf., Nara, Japan, Jan. 30–Feb. 2, 1991, pp. 69–73

5
- 84918677815
- W. Ehrfeld, F. Gotz, D. Munchmeyer, W. Schelb and D. Schmidt, Liga process: sensors construction techniques via X-ray lithography, Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, June 6–9, 1988, pp. 1–4

6
- 84918693501
- H. Guckel, T.R. Christenson, K.J. Skrobis, J.J. Sniegowski, J.W. Kang, B. Choi and E.G. Lovell, Microstructure sensors, Proc. 1990 IEEE Int. Electron Devices Meet., San Francisco, CA, USA, Dec. 9–12, 1990, pp. 613–616

7
- 0026153563
- Fabrication of capacitive acceleration sensors by the LIGA technique
- (1991) Sensors and Actuators A: Physical , vol.25-27 A , pp. 559-563
- Burbaum¹ Mohr² Bley³

8
- 84918677990
- B. Choi, E.G. Lovell, H. Guckel, T.R. Christenson, K.J. Skrobis and J.W. Kang, Development of pressure transducers utilizing deep X-ray lithography, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, June 24–28, 1991, pp. 393–396

9
- 0026152062
- Fabrication of a planar grating spectrograph by deep-etch lithography with synchrotron radiation
- (1991) Sensors and Actuators A: Physical , vol.25-27 A , pp. 571-575
- Mohr¹ Anderer² Ehrfeld³

10
- 84918684271
- J. Mohr, C. Burbaum, P. Bley, W. Menz and U. Wallrabe, Movable microstructures manufactured by the LIGA process as basic elements for microsystems, Proc. Micro System Technologies '90, Berlin, Germany, Sept. 10–13, 1990, pp. 529–537

11
- 84918693069
- J. Mohr, P. Bley, C. Burbaum, W. Menz and U. Wallrabe, Fabrication of microsensor and microactuator elements by the LIGA process, Tech. Digest, 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, June 24–28, 1991, pp. 607–609

12
- 84918658619
- Polyimide enables high lead count TAB
- (1988) Semiconductor Int. , pp. 28-31
- Milosevic¹ Perret² Losert³ Schlenkrich⁴

13
- 84918655971
- K.K. Chakravorty, C.P. Chien, J.M. Cech, L.B. Branson, J.M. Atencio, T.M. White, L.S. Lathrop, B.W. Aker, M.H. Tanielian and P.L. Young, High density interconnection using photosensitive polyimide and electroplated copper conductor lines, Proc. 39th Electronic Components Conf., Houston, TX, USA, May 22–24, 1989, pp. 135–142

14
- 84918663742
- K. Moriya, T. Ohsaki and K. Katsura, Photosensitive polyimide dielectric and electroplating conductor, Proc. 34th Electronic Components Conf., New Orleans, LA, USA, May 14–16, 1984, pp. 82–87

15
- 0023533311
- Processing of photosensitive polyimide for packaging applications
- (1987) IEEE Transactions on Components, Hybrids, and Manufacturing Technology , vol.12 CHMT , pp. 690-694
- Rickerl¹ Stephanie² Slota³

16
- 51249171186
- High rate magnetron RIE of thick polyimide films for advanced computer packaging applications
- (1989) J. Electron. Mater. , vol.18 , pp. 293-299
- Dishon¹ Bobbio² Tessier³ Ho⁴ Jewett⁵

17
- 84918704184
- G.M. Adema, I. Turlik, P.L. Smith and M.J. Berry, Effects of polymer/metal interaction in thin-film multichip module applications, Proc. 40th Electronic Components Conf., Las Vegas, NV, USA, May 20–23, 1990, pp. 717–726

18
- 84918697891
- A.B. Frazier and M.G. Allen, High aspect ratio electroplated microstructures using a photosensitive polyimide process, Proc. 1992 IEEE Microelectromechanical Systems Conf., Travemünde, Germany, Feb. 1992, pp. 87–92

19
- 0027607944
- Metallic microstructures fabricated using photosensitive polyimide electroplating molds
- (1993) J. Microelectromech. Syst. , vol.2 , pp. 87-94
- Frazier¹ Allen²

20
- 84918657314
- H. Guckel, K.J. Skrobis, T.R. Christenson, J. Klein, S. Han, B. Choi and E.G. Lovell, Fabrication of assembled micromechanical components via deep X-ray lithography, Proc. 1991 IEEE Microelectromechanical Systems Conf., Nara, Japan, Jan. 30–Feb. 2, 1991, pp. 74–79

21
- 84918674556
- H. Guckel, K.J. Skrobis, T.R. Christenson, J. Klein, S. Han, B. Choi, E.G. Lovell and T.W. Chapman, On the application of deep X-ray lithography with sacrificial layers to sensor and actuator construction (the magnetic micromotor with power takeoffs), Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, June 24–28, 1991

22
- 84918668609
- A.B. Frazier, J.W. Babb, M.G. Allen and D.G. Taylor, Design and fabrication of electroplated micromotor structures, Proc. ASME Winter Ann. Meet., Atlanta, GA, USA, Dec. 1–6, 1991, DSC-32, pp. 135–146

23
- 84918705405
- C.H. Ahn, Y.J. Kim and M.G. Allen, A fully integrated micromachined toroidal inductor with a nickel-iron magnetic core, Proc. 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, June 7–10, 1993, pp. 70–73

24
- 0022984064
- Optimization of via hole plasma etching in polyimide for overlay interconnections
- (1986) J. Microelectronic Eng. , vol.4 , pp. 207-219
- Deschler¹ Balk²

25
- 0024699048
- 2 reactive ion etching pattern transfer step in multilevel lithography
- (1989) J. Polym. Eng. Sci. , vol.29 , pp. 878-881
- Jurgensen¹ Shaqfeh²

26
- 0023363982
- Dependence of process parameters on planarization isolation and etching of sloped vias in polyimides for GaAs ICs
- (1987) J. Solid State Technol. , vol.75 , pp. 850-852
- Singh¹ Roybardhan² Kothari³ Singh⁴ Khokle⁵

27
- 84918659591
- R. Jensen, Recent advances in thin film multilayer interconnect technology for IC packaging, Proc. Electronic Packaging Materials Science III, Mater. Res. Soc., Pittsburgh, PA, USA, Nov. 30–Dec. 4, 1988, pp. 73–79

28
- 0021651243
- Copper/polyimide materials system for high performance packaging
- (1984) IEEE Transactions on Components, Hybrids, and Manufacturing Technology , vol.7 CHMT , pp. 383-393
- Jensen¹ Cummings² Vora³

29
- 0020848299
- 6 plasmas
- (1983) J. Electrochem. Soc. , vol.130 , pp. 2231-2236
- Turban¹ Rapeaux²

30
- 0000438655
- 4
- (1985) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.3 , pp. 893-904
- Egitto¹ Emmi² Horwath³

31
- 0025205541
- 2 discharges
- (1990) J. Polym. Degradation and Stability , vol.27 , pp. 169-181
- Scott¹ Babu² Partch³

32
- 84918675447
- F. Shimokawa and S. Matsui, Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching system, Proc. 1991 IEEE Microelectromechanical Systems Conf., Nara, Japan, Jan. 30–Feb. 2, 1991, pp. 192–197

33
- 84918671667
- A. Furuya, F. Shimokawa, T. Matsuura and R. Sawada, Microgrid fabrication of fluorinated polyimide by using magnetically controlled reactive ion etching, Proc. 1993 IEEE Microelectromechanical Systems Conf., Fort Lauderdale, FL, USA, Feb. 7–10, 1993, pp. 59–64

34
- 84918668529
- K. Murakami, Y. Wakabayashi, K. Minami and M. Esashi, Cryogenic dry etching for high aspect ratio microstructures, Proc. 1993 IEEE Microelectromechanical Systems Conf., Fort Lauderdale, FL, USA, Feb. 7–10, 1993, pp. 65–70

35
- 84918683850
- M.A. Green.Solar Cells: Operating Principles, Technology and System Applications. Prentice-Hall,Englewood Cliffs, NJ Ch. 8 138-169

36
- 0022559397
- Solid-state electrodes for multichannel multiplexed intracortical neuronal recording
- (1986) IEEE Trans. Biomed. Eng. , vol.33 BME , pp. 230-241
- BeMent¹ Wise² Anderson³ Najafi⁴ Drake⁵

37
- 84918678138
- A.B. Frazier, D.P. O'Brien and M.G. Allen, Two dimensional metallic microelectrode arrays for extracellular stimulation and recording of neurons, Proc. 1993 IEEE Microelectromechanical Systems Conf., Fort Lauderdale, FL, USA, Feb. 7–10, 1993, pp. 195–200

38
- 0027562316
- A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core
- (1993) IEEE J. Microelectromech. Syst. , vol.2 , pp. 15-22
- Ahn¹ Allen²

39
- 84918663404
- C.H. Ahn, Y.J. Kim and M.G. Allen, A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils, Proc. 1993 IEEE Microelectromechanical Systems Conf., Fort Lauderdale, FL, USA, Feb. 7–10, 1993, pp. 1–6

40
- 84918669737
- A toroidal-meander type integrated inductor with a multilevel meander magnetic core
- in press
- (1993) IEEE Trans. Magn.
- Ahn¹ Allen²

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