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Sensors and Actuators: A. Physical

Volumn 33, Issue 3, 1992, Pages 207-220

The case for magnetically driven microactuators

(1) Busch Vishniac, I J a

a UNIVERSITY OF TEXAS AT AUSTIN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATICS; FABRICATION; MAGNETIC FIELD EFFECTS; MICROELECTRONIC PROCESSING;

MAGNETIC MICROACTUATION; MICROACTUATORS; MICROFABRICATION;

ACTUATORS;

EID: 0026882942 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(92)80168-3 Document Type: Article

Times cited : (72)

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