Magnetic micro-actuator

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 120-124

  Yanagisawa, K ^a   Tago, A ^a   Ohkubo, T ^a   Kuwano, H ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; MAGNETIC DEVICES; SEMICONDUCTING SILICON;

MAGNETIC MICROACTUATORS; MICROACTUATORS; MICROPUMPS; MICROSYRINGES; MICROVALVES;

ACTUATORS;

EID: 0025751103     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)