A Fully Integrated Planar Toroidal Inductor With A Micromachined Nickel-Iron Magnetic Bar

IEEE Transactions on Components Packaging and Manufacturing Technology Part A

Volumn 17, Issue 3, 1994, Pages 463-469

  Kim, Yong J ^b   Allen, Mark G ^b  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

dc dc converter; Fully integrated; microactuator; microma chining technique; micromachined component; nickel iron; planar, toroidal inductor

Indexed keywords

ELECTRIC COILS; ELECTRIC RESISTANCE; ELECTRIC RESISTANCE MEASUREMENT; ELECTROMAGNETIC WAVE INTERFERENCE; MAGNETIC CIRCUITS; MAGNETIC CORES; MAGNETIC PERMEABILITY; MAGNETIC PROPERTIES; MICROELECTRONICS; MICROMACHINING; NICKEL; POWER CONVERTERS;

COIL RESISTANCE; ELECTROPLATED VIAS; FULLY INTEGRATED PLANAR TOROIDAL INDUCTOR; LEAKAGE FLUX; MAGNETIC BAR; MULTILEVEL METALIZATION TECHNIQUE; SILICON WAFER; THICK CONDUCTOR LINES;

ELECTRIC INDUCTORS;

EID: 0028495041     PISSN: 10709886     EISSN: None     Source Type: Journal    
DOI: 10.1109/95.311757     Document Type: Article

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