Characteristics And Analysis Of A Thin Film Inductor With Closed Magnetic Circuit Structure

IEEE Transactions on Magnetics

Volumn 28, Issue 5, 1992, Pages 3015-3017

  Yamaguchi, M ^a   Arakawa, S ^a   Ohzeki, H ^a   Hayashi, Y ^a   Arai, K I ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEMAGNETIZATION; EDDY CURRENTS; MAGNETIC CIRCUITS; MAGNETIC MATERIALS; MAGNETIC THIN FILM DEVICES; PHOTOLITHOGRAPHY; SPUTTERING;

CLOSED MAGNETIC CIRCUITS; PERMALLOY FILMS; RF SPUTTERING MACHINES; SPIRAL INDUCTORS; THIN FILM INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0026911212     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.179702     Document Type: Article

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