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Sensors and Actuators: A. Physical
Volumn 43, Issue 1-3, 1994, Pages 11-16
Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip electronics
Author keywords

[No Author keywords available]
Indexed keywords

ACTUATORS; ELECTROMAGNETS; MAGNETIC FIELDS; MICROELECTRONICS; TRANSDUCERS;
EID: 0028429494     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(93)00652-K     Document Type: Article
Times cited : (22)
References (14)
  • 1
    • 84918655281 scopus 로고    scopus 로고
    • F. Cardot and F. Porret, Photolithographic silicon-based technologies applied to high density magnetographic heads, Proc. IS&T 7th Int. Congr. Advances in Non-Impact Printing Technologies, Portland, OR, USA, Oct. 1991
  • 2
    • 84918656343 scopus 로고    scopus 로고
    • F. Cardot, F. Porret and H. Tannenberger, Alloy electro-deposition of magnetic microstructure, 42nd Meet. Int. Society Electrochemistry, Montreux, Switzerland, Aug. 1991
  • 3
    • 84918654412 scopus 로고    scopus 로고
    • C.H. Ahn, Y.J. Kim and M.G. Allen, A fully integrated micromachined toroidal inductor with a nickel-iron core (the switched DC/DC boost converter application), Proc. Transducers '93, Yokohama, Japan, June 7–10, 1993, pp. 70–73
  • 4
    • 84918675237 scopus 로고    scopus 로고
    • S. Kawahito, Y. Sasaki, M. Ashiki and T. Nakamura, Micromachined solenoids for highly sensitive magnetic sensors, Proc. Transducers '91, San Francisco, CA, USA, June 24–28, 1991, pp. 1077–1080
  • 5
    • 84918687207 scopus 로고    scopus 로고
    • B. Wagner and W. Benecke, Microfabricated actuator with moving permanent magnet, Proc. IEEE Micro Electro Mechanical Systems Workshop, 1991, pp. 27–32
  • 6
    • 84918679870 scopus 로고    scopus 로고
    • C.H. Ahn, Y.J. Kim and M.G. Allen, A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils, Proc. IEEE Micro Electro Mechanical Systems Workshop, 1993, pp. 1–6
  • 7
    • 84918670249 scopus 로고    scopus 로고
    • H. Guckel, T.R. Christenson, K.J. Skrobis, T.S. Jung, J. Klein, K.V. Hartojo and I. Widjaja, A first functional current excited planar rotational magnetic micromotor, Proc. IEEE Micro Electro Mechanical Systems Workshop, 1993, pp. 7–11
  • 8
    • 84918654519 scopus 로고    scopus 로고
    • B.P. Cherbuy, New concepts for achieving high density magnetographic images, Proc. IS&T 7th Int. Congr. Advances in Non-Impact Printing Technologies, Portland, OR, USA, Oct. 1991
  • 10
    • 84918654408 scopus 로고    scopus 로고
    • 4NOH solutions, Proc. Transducers '91, San Francisco, CA, USA, June 24–28, 1992, pp. 811–814
  • 11
    • 84918668501 scopus 로고    scopus 로고
    • U. Schnackenberg, W. Beneke and P. Lange, TMAHW etchants for silicon micromachining, Proc. Transducers '91, San Francisco, CA, USA, June 24–28, 1991, pp. 811–814

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.