Fabrication and Basic Characteristics of Dry-Etched Micro Inductors

IEEE Transactions on Magnetics

Volumn 26, Issue 5, 1990, Pages 2014-2016

  Yamaguchi, M ^a   Matsumoto, M ^a   Ohzeki, H ^a   Arai, K I ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC COILS; MAGNETIZATION;

DRY ETCHING; MEANDER INDUCTORS; MICROINDUCTORS;

ELECTRIC INDUCTORS;

EID: 0025490784     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/20.104602     Document Type: Article

References (3)

1. K. Kawabe, H. Koyama, K. Shirae: IEEE Trans. Magn., MAG-20, 1804(1984).
2. H. Matsuki, H. Miyazawa, K. Nadehara, M. Yamaguchi, K. Murakami, T. Yamamoto: IEEE Trans. Magn., MAG-25, 25, 3994(1989).
3. F. E. Terman: “Radio Engineers’ Handbook”, McGraw-Hill, New York(1943).