Future of actuators and microsystems

Sensors and Actuators, A: Physical

Volumn 56, Issue 1-2, 1996, Pages 105-111

  Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Actuators; Microsystems

Indexed keywords

INFORMATION TECHNOLOGY; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTRONICS;

MICRO MINIATURE MOTION SYSTEMS; MICROACTUATORS;

ACTUATORS;

EID: 0030205904     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/0924-4247(96)01282-4     Document Type: Article

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