New opportunities for micro actuators

Transducers '91

Volumn , Issue , 1991, Pages 14-20

  Fujita, Hiroyuki ^a   Gabriel, Kaigham J ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; ELECTROSTATIC DEVICES; FLUIDICS; SENSORS;

BIOLOGICAL OBJECTS HANDLING; CILIARY MOTION SYSTEM; ELECTROSTATIC MICROMOTORS; HARMONIC MICROMOTORS; MICRO SMART MODULES; MICROACTUATORS;

ACTUATORS;

EID: 0026403028     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (44)