The LIGA technique--A novel concept for microstructures and the combination with Si-technologies by injection molding

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 69-73

  Menz, W ^a   Bacher, W ^a   Harmening, M ^a   Michel, A ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY--ETCHING; METALS AND ALLOYS--INJECTION MOLDING; PLASTICS--INJECTION MOLDING;

DEEP-ETCH LITHOGRAPHY; LIGA TECHNIQUE;

SEMICONDUCTING SILICON;

EID: 0025846559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)