Fabrication and testing of a micro superconducting actuator using the Meissner effect

Proceedings. IEEE Micro Electro Mechanical Systems-An Investigation of Micro Structures, Sensors, Actuators, Machines

Volumn , Issue , 1990, Pages 61-66

  Kim, Yong Kweon ^a   Katsurai, Makoto ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; MAGNETIC LEVITATION; MAGNETISM--DIAMAGNETISM; SUPERCONDUCTING DEVICES;

LEVITATION HEIGHTS; LORENTZ FORCE; MEISSNER EFFECT; MICRO SUPERCONDUCTING ACTUATOR; MICROMACHINE LEVITATION;

ELECTROMECHANICAL DEVICES;

EID: 0025685948     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)