An integrated lateral tunneling unit

Volumn , Issue , 1992, Pages 214-219

  Kobayashi, Dai ^a   Hirano, Toshiki ^a   Furuhata, Tomotake ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING;

COMB-DRIVE ACTUATORS; IC CHIPS; LATERAL TUNNELING UNITS; WAFERS;

ACTUATORS;

EID: 0027071431     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.1992.187720     Document Type: Conference Paper

References (11)