A miniature Fabry-Perot interferometer with a corrugated silicon diaphragm support

Technical Digest, 1990 Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1990, Pages 140-144

  Jerman, J H ^a   Clift, D J ^a   Mallinson, S R ^a  

^a IC Sensors Subsidiary of MSI   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; ELECTROMECHANICAL DEVICES - MICROELECTROMECHANICAL; MIRRORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

DIELECTRIC MIRRORS; FABRY-PEROT INTERFEROMETERS; NEAR INFRARED INTERFEROMETERS; SILICON DIAPHRAGMS;

INTERFEROMETERS;

EID: 0025557605     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/solsen.1990.109839     Document Type: Conference Paper

References (5)