Isolation technology for joined tungsten MEMS

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 189-194

  Chen, Liang Yuh ^a   Santos, Edval J P ^a   MacDonald, Noel C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

TUNGSTEN;

ISOLATION TECHNOLOGY; MEMS;

ACTUATORS;

EID: 0027188577     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)