Fabrication of assembled micromechanical components via deep X-ray lithography

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 74-79

  Guckel, H ^a   Skrobis, K J ^a   Christenson, T R ^a   Klein, J ^a   Han, S ^a   Choi, B ^a   Lovell, E G ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; MICROELECTRONICS--FABRICATION; SEMICONDUCTOR DEVICE MANUFACTURE; X-RAYS;

DEEP X-RAY LITHOGRAPHY; LIGA PROCESS;

LITHOGRAPHY;

EID: 0025723094     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)