Ferroelectric thin film ultrasonic micromotors

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 109-113

  Udayakumar, K R ^a   Bart, S F ^a   Flynn, A M ^a   Chen, J ^a   Tavrow, L S ^a   Cross, L E ^a   Brooks, R A ^a   Ehrlich, D J ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS--THIN FILMS; GELS; PIEZOELECTRIC DEVICES;

LEAD ZIRCONATE TITANATE (PZT); MICROMOTORS; PIEZOELECTRIC MICROMOTORS;

ELECTRIC MOTORS;

EID: 0025862618     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)