Microfabricated actuator with moving permanent magnet

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 27-32

  Wagner, B ^a   Benecke, W ^a  

^a Germany ^*

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES--MICROELECTROMECHANICAL; MAGNETS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICES;

MAGNETIC COUPLING; MICROACTUATORS; MOVING MAGNETS; PERMANENT MAGNETS;

ACTUATORS;

EID: 0025723096     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)