Sub-micron gaps without sub-micron etching

Proceedings. IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1991, Pages 57-62

  Furuhata, T ^a   Hirano, T ^a   Gabriel, K J ^a   Fujita, H ^a  

^a IBM RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS;

POLYSILICON; SUB-MICRON ETCHING; SUB-MICRON GAPS;

SEMICONDUCTING SILICON;

EID: 0025808467     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)