IC microtransducers - New components with old materials?

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3224, Issue , 1997, Pages 2-13

  Baltes, Henry ^a   Lange, Dirk ^a   Koll, Andreas ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Chemical sensor; CMOS; Infrared sensor; MEMS; Micromirror; Microtransducers; Piezoresistive beam

Indexed keywords

CHEMICAL SENSORS; COMPUTER AIDED DESIGN; HYDROCARBONS; INFRARED DETECTORS; INFRARED DEVICES; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL DEVICES;

CMOS; INFRARED SENSOR; MICROMIRROR; MICROTRANSDUCERS; PIEZORESISTIVE BEAM;

SENSORS;

EID: 0009429185     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.284502     Document Type: Conference Paper

References (38)

1. H. Baltes, A. Häberli, "CMOS MEMS", Proc. IEEE ISCAS 4 (1997) 2813-2816.
2. H. Baltes, "Future of IC microtransducers", Sensors and Actuators A 56 (1996) 179-192.
3. H. Baltes, O. Paul, J. G. Korvink, M. Schneider, J. Bühler, N. Schneeberger, D. Jaeggi, P. Malcovati, M. Hornung, A. Häberli, M. von Arx, J. Funk, "IC MEMS microtransducers", IEDM Technical Digest, IEEE (1996) 521-524.
4. H. Baltes, O. Paul, D. Jaeggi, "Thermal CMOS sensors - an overview", Sensors Update 1 (1996) 121-142.
5. H. Baltes, A. Häberli, P. Malcovati, F. Maloberti, "Smart sensor interfaces", IEEE ISCAS 4 (1996) 380-383.
6. P. Malcovati, CMOS Thermoelectric Sensor Interfaces, Ph. D. Thesis 11424, ETH Zurich (1996).
7. P. Malcovati, F. Maloberti, H. Baltes, "Progress in microsensor interfaces", Sensors Update 1 (1996) 143-171.
8. A. Häberli, Compensation and Calibration of IC Microsensors, Ph. D. Thesis 12090, ETH Zurich (1997).
9. J. G. Korvink, H. Baltes, "Microsystem modeling", Sensors Update 2 (1996) 181-209.
10. J. Funk, J. G. Korvink J. Buhler, M. Bächtold, H. Baltes, "SOLIDIS: a tool for microactuator simulation in 3-D", J. MEMS 6 (1997) 70-82.
11. M. Bächtold, Efficient 3D Computation of Electrostatic Fields and Forces in Microsystems, PhD Thesis 12165, ETH Zuerich (1997).
12. C. Hierold, A Hildebrandt, U. Näher, T. Scheiter, B. Mensching, M. Steger, R. Tielert, "A pure CMOS surface micromachined integrated accelerometer, Proc. IEEE MEMS (1996) 174-175.
13. A. Häberli, O. Paul, M. Faccio, F. Maloberti and H. Baltes, "CMOS integration of a themal pressure sensor system", Proc. IEEE ISCAS (1996) 377-380.
14. J. Bühler, F.-P. Steiner, H. Baltes, "Linear array of complementary metal oxide semiconductor double-pass metal micromirrors", Opt. Eng. 36 (1997) 1391-1397.
15. J. Bühler, Deformable Micromirror Arrays by CMOS Technology, Ph. D. Thesis 12139, ETH Zurich (1997).
16. F. Mayer, G. Salis, O. Paul, H. Baltes, "Scaling of thermal CMOS gas flow microsensors: experiment and simulation", Proc. IEEE MEMS (1996) 116-121.
17. J. Bühler, J. Funk, O. Paul, F.-P. Steiner, H. Baltes, "Thermally actuated CMOS micromirrors", Sensors and Actuators A 46-47 (1995) 572-575.
18. Dominik Jaeggi, Thermal Converters by CMOS Technology, Ph. D. Thesis 11567, ETH Zurich 1996.
19. U. Münch, D. Jaeggi, K. Schneeberger, A. Schaufelbühl, O. Paul, H. Baltes, J. Jasper, "Industrial fabrication technology for CMOS infrared sensor arrays", Transducers 1 (1997) 205-208.
20. M. Schneider, T. Müller, M. Hornung, A. Häberli, H. Baltes, "Integrate micromachined decoupled CMOS chip on chip", Proc. IEEE MEMS (1997)
21. E. H. Klaassen, G. T. A. Kovacs, "Integrated thermal conductive vacuum sensor, Solid State Sensor and Actuator Workshop Technical Digest (1996) 249-252.
22. G. K. Fedder, S. Santhanam, M. L. Reed, S. C. Eagle, D. F. Guillou, M. S.-C. Lu, L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process", Proc. IEEE MEMS (1995) 13-24.
23. M. Müller, R. Gottfried-Gottfried, H. Kück, W. Mokwa, Transducers 95 Digest of Technical Papers 2 (1995) 640-643.
24. O. Brand, M. Hornung, R. Frey, H. Baltes, C. Hafner, "Ultrasound barrier microsystem for object detection based on micromachined transducer elements", J. MEMS 6 (1997) 151-160.
25. M. Schneider, R. Castagnetti, M. G. Allen, H. Baltes, "Integrated flux concentrator improves CMOS magneto transistor", Proc. IEEE MEMS (1995) 151-156.
26. P. Malcovati, A. Häberli, F. Mayer, O. Paul, F. Maloberti, H. Baltes, Symposium on VLSI Circuits Digest of Technical Papers (1995) 45-46.
27. W. Kuehnel, S. Sherman, "A surface micromachined silicon accelerometer with on-chip detection circuitry", Sensors and Actuators A 45 (1994) 7-16.
28. J. H. Smith, S. Montague, J. J. Sniegowski, J. R. Murray, P. J. McWhorter, "Embedded micromechanical devices for the momolithic integragtion of MEMS with CMOS", IEDM Technical Digest, IEEE (1995) 609-612.
29. K. A. Shaw, N. C. MacDonald, "Integrating SCREAM micromachined devices with integrated circuits", Proc. IEEE MEMS (1996) 44-48.
30. G. Lin, K. S. Pister, K. P. Roos, Standard CMOS piezoresistive sensor to quantify heart cell contractile forces Proc. IEEE MEMS (1996) 150-155.
31. J. Funk, J. G. Korvink, M. Bächtold, H. Baltes, "Coupled 3D thermo-electro-mechanical simulations of microac tuators" Proc. IEEE MEMS (1996) 133-138.
32. H. Baltes, J. G. Korvink, O. Paul, "Numerical modeling and materials characterisation for intergrated microelectromechanical systems", Simulation of Semiconductor Devices and Processes 6 (1995) 1-9.
33. O. Paul, M. von Arx, H. Baltes, "CMOS IC layers: complete set of thermal conductivities", Semiconductor Characterization - Present Status and Future Needs, American Institute of Physics (1996) 197-201.
34. M. von Arx, O. Paul, H. Baltes, "Test structures to measure the Seebeck coefficient of CMOS IC polysilicon", Proc. IEEE Int. Conf. on Microelectronic Test Structures 9 (1996) 117-122.
35. M. von Arx, O. Paul, H. Baltes, "Thermoelectric test structures to measure the heat capacity of CMOS layer sandwiches", Transducers 1 (1997) 619-622.
36. H. Baltes, A. Koll, D. Lange, "The CMOS MEMS nose --- fact or fiction ?", Proc. IEEE ISIE (1997) in press.
37. F. P. Steiner, A. Hierlemann, C. Cornila, G. Noetzel, M. Bächtold, J. G. Korvink, W. Gopel and H. Baltes: "Polymer coated capacitive microintegrated gas sensor", Transducers 95 Digest of Technical Papers 2 (1995) 814-817.
38. C. Cornila, A. Hierlemann, R. Lenggenhager, P. Malcovati, H. Baltes, G. Noetzel, U. Weimar, W. Göpel: "Capacitive sensors in CMOS technology with polymer coating", Sensors and Actuators B 24-25 (1995) 357-361.