Scaling of thermal CMOS gas flow microsensors: experiment and simulation

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 116-121

  Mayer, F ^a   Salis, G ^a   Funk, J ^a   Paul, O ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; FLOW OF FLUIDS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; SEMICONDUCTING SILICON;

GAS FLOW MICROSENSORS; OUTPUT CHARACTERISTIC; SILICON ETCHING; THERMAL SENSORS;

SENSORS;

EID: 0029759774     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)