Integrated micromachined decoupled CMOS chip on chip

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 512-517

  Schneider, M ^a   Muller, T ^a   Haberli, A ^a   Hornung, M ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; POROUS SILICON; POTASSIUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SYSTEM STABILITY; THERMAL CONDUCTIVITY OF SOLIDS;

DECOUPLING; DIELECTRIC MEMBRANES; POTASSIUM HYDROXIDE; SILICON MEMBRANES;

CMOS INTEGRATED CIRCUITS;

EID: 0030679948     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)