Integrating SCREAM micromachined devices with integrated circuits

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 44-48

  Shaw, Kevin A ^a   MacDonald, Noel C ^a  

^a Cornell Univ ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHEMICAL VAPOR DEPOSITION; FIELD EFFECT TRANSISTORS; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; MASKS; OPERATIONAL AMPLIFIERS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

MICROMACHINED DEVICES; OPTICAL LITHOGRAPHY; PHYSICAL VAPOR DEPOSITION; SINGLE CRYSTAL SILICON REACTIVE ETCHING AND METALLIZATION;

INTEGRATED CIRCUITS;

EID: 0029732345     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (26)