CMOS integration of a thermal pressure sensor system

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 1, Issue , 1996, Pages 377-380

  Haberli, A ^a   Paul, O ^a   Malcovati, P ^a   Faccio, M ^a   Maloberti, F ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ETCHING; HEAT SINKS; HEAT TRANSFER; READOUT SYSTEMS; SENSORS; THERMAL EFFECTS;

HEAT SOURCE; READOUT CIRCUIT; THERMAL PRESSURE SENSOR;

PRESSURE GAGES;

EID: 0029717207     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)